研究领域

超快激光加工；化学机械抛光；摩擦腐蚀；微纳制造"研究项目
1. 国家自然科学基金青年项目，集成电路亚14 nm节点FinFET的化学机械抛光基础研究，2018/01-2020/12，25万元，项目负责人
2. 博士后科学基金面上项目，稀土元素掺杂氧化铈磨粒在FinFET化学机械抛光中的应用，2017/11-2019/09，5万元，项目负责人
3. 博士后科学基金特别资助，柔性纳米磨粒的制备及在集成电路化学机械抛光中的应用，2018/06-2019/09，15万元，项目负责人"

近期论文

代表性著作
1. Jie Cheng, Sulin Chen, Fan Zhang, Bin Shen, Xinchun Lu and Jinshan Pan, Corrosion- and Wear-Resistant Composite Film of Graphene and Mussel Adhesive Proteins on Carbon Steel, Corrosion Science 164 (2020), 108351.
2. Jie Cheng, Shuo Huang, Yang Li, Tongqing Wang, Lile Xie, and Xinchun Lu. RE (La, Nd and Yb) doped CeO2 Abrasive Particles for Chemical Mechanical Polishing of Dielectric Materials: Experimental and Computational Analysis, Applied Surface Science 506 (2020), 144668.
3. Jie Cheng, Jinshan Pan, Tongqing Wang, Xinchun Lu. Micro-galvanic corrosion of Cu/Ru couple in potassium periodate (KIO4) solution, Corrosion Science 137 (2018), 184-193.
4. Jie Cheng, Tongqing Wang, Zhimin Chai, Xinchun Lu, Tribocorrosion Study of Copper During Chemical Mechanical Polishing in Potassium Periodate-Based Slurry, Tribology Letters, 50 (2015) 177-184.
5. Jie Cheng, Research on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnect, Springer, 2018 (Recognizing Outstanding Ph.D. Research)