个人简历
曾任日本东京大学工学部访问学者（90年10月-91年3月、94年9月-12月）;西班牙马德里自治大学访问学者（94年1月-2月）;日本学术振兴会研究员（JSPS Fellow,97年6月-98年3月）和日本国立机械技术研究所NEDO产业技术研究员（98年4月-00年9月）。 1999年入选中国科学院“百人计划”,2000年回到中国科技大学担任教授/博士生导师。曾任精密机械与精密仪器系常务副主任、工程科学学院分党委书记、副院长；现任微系统技术科学研究中心主任，兼任中国科学技术大学超精密工程研究所所长、校学位委员会委员，中国科学院南京天文光学技术研究所兼职研究员/博士生导师。学术服务包括担任中国微米纳米技术学会理事、中国仪器仪表学会理事、精密机械学会副秘书长、安徽省仪器仪表学会常务副理事长，担任《传感技术学报》、《光学精密工程》和《中国科学技术大学学报》等期刊编委，并曾应邀担任《J. Micromechanics and Micro-engineering》 guest editor主编IWMF特辑。入选国家教育部“优秀青年教师资助计划”,“安徽省高校优秀共产党员”,中国电子学会优秀论文奖,享受国务院政府特殊津贴。
研究领域
微机电系统技术 超精密测量 超精密天文仪器
近期论文
Corrosion mechanism and surface passivation strategues of polycrystalline silicon electrodes. Sensors and Actuators A: Physical, 2010 Fabrication of cantilever arrays with nano-aperture hollow tips for parallel microplasma etching.，Microelectronic Engineering, 2010. 87(12): p. 2475-2481 Research on the resolution of micro stereo lithography，Chinese Optics Letters, 2009. 7(8): p. 724-727. Residual stress characterization of polycrystalline 3C-SiC films on Si(100) deposited from methylsilane, Journal of Applied Physics, v106, 2009, 013505.Anodic Oxidation of Polycrystalline 3C-silicon Carbide Thin Films during MEMS Operation, J. Micromech. Microeng. v19, 2009,035024. Integration of displacement sensor into bulk PZT thick film actuator for MEMS deformable mirror, Sensors and Actuators,A: Physical, v 147, n 1, Sep 15, 2008, p 242-247 Preparation of a high-quality PZT thick film with performance comparable to those of bulk materials for applications in MEMS, Journal of Micromechanics and Microengineering, v 18, n 6, Jun 1, 2008, p 065001 Influences of environmental humidity on micro object handling efficiency, Journal of Micromechanics and Microengineering,v 17, n 2, Feb 1, 2007, p 187-192 Design,fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror, Journal of Micromechanics and Microengineering, v 17, n 12, Dec 1, 2007, p 2439-2446 Microdevice assembling by adhesive type probe in humid environment, Review of Scientific Instruments, 76, 085104, 2005. A novel wet etching process for PZT thin film for application in MEMS, Jpn. J. Appl. Phys., Vol. 43, No. 6B, 2004 Design and Simulation of Microheater Actuated by A PZT Microcantilever for High Density Data Storage; Sensors and Actuators A108(2003), pp7-11; Microstructure and electrical properties of PZT thick film prepared by electrostatic spray deposition; Sensors and Actuators A108(2003)，pp2-6; Effect of bottom electrodes on microstructures and electric properties of sol-gel derived Pb(Zr0.53,Ti0.47)O3 thin films, Thin Solid Films, 416(2002)，pp66-67ESD method for Thick PZT film preparation, Jpn. J. Appl. Phys., Vol. 41(2002), Pt.1, No.6B，pp4317-4320 Novel multi-bridge structured piezoelectric micro-device for scanning force microscopy, J. Vac. Sci. Technol. B.18(6), pp. 3604-3607, Nov/Dec 2000
