个人简历

1993年毕业于西南科技大学，获机械制造专业工学学士学位。同年在甘肃建筑材料工业学校任教。2001年在兰州大学物理科学与技术学院攻读硕士学位。2004年在中科院半导体所攻读博士学位（与兰州大学联合培养）。2006年博士毕业，获材料物理专业工学博士学位。同年到厦门大学物理机电学院从事博士后研究，2008年出站并留校任教。2013年在挪威科技大学和Vestfold大学微系统研究中心做访问学者。

研究领域

主要在微器件与微系统领域开展研究,

近期论文

1. Wireless passive polymer-derived SiCN ceramic sensor with integrated resonator/antenna. Applied Physics Letters, Vol.103(16), pp. 1-5, 2013. 2. Silicon-glass-based single piezoresistive pressure sensors for harsh environment applications. Journal of Micromechanics and Microengineering. Vol.23,pp. 075020 (8pp), June, 2013. 3. Self-Packaging Fabrication of Silicon-Glass-Based Piezoresistive Pressure Sensor. IEEE Electron Device Letters, Vol. 34, No. 6, pp.789-791, June 2013. 4. Design and simulation of GaN based Schottky betavoltaic nuclear micro-battery. Applied Radiationand Isotopes, Vol.80, pp.17-22, June. 2013. 5. Silicon-Based Micro-Machined Infrared Emitters with a Micro-Bridge and a Self-Heating Membrane Structure. IEEE Photonics Technology Letters, Vol. 25, No. 11, pp.1014-1016, June, 2013. 6. A high open-circuit voltage gallium nitride nuclear betavoltaic microbattery. Journal of Micromechanics and Microengineering, Vol.22(7), pp.074011, 2012. 7. Design and Simulation of Betavoltaic Battery Using Large-grain Polysilicon. Applied Radiation and Isotopes, Vol.70(10), pp 2388-2394, 2012. 8. 适用于恶劣环境的压阻式压力传感器. 光学精密工程, Vol.20(03), pp.550-555, 2012. 9. Study on dielectric charging in low-stress silicon nitride with the MIS structure for reliable MEMS applications. Journal of Micromechanics and Microengineering, Vol.21, 125019 (6pp), 2011. 10. MEMS-based plasmon infrared emitter with hexagonal hole arrays perforated in the Al-SiO2-Si structure. Journal of Micromechanics and Microengineering, Vol.21, Page: 105023, 2011. 11. Demonstration of a High Open-Circuit Voltage GaN Betavoltaic Microbattery. Chinese Physics Letters, Vol. 28, No.7, 078401(4pp), 2011. 12. High open-circuit voltage betavoltaic cell- based on GaN p-i-n homojunction. Electronics Letters, Vol.47, No.12, pp. 720-722, 2011. 13. 基于绝缘体上硅晶片的微机电系统红外光源. 光学学报, Vol.30(5), pp.1455-1458, 2010. 14. Charging and discharging in ion implanted dielectric films used for capacitive radio frequency microelectromechanical systems switch. Journal of Applied Physics, Vol.105, pp.124503, 2009. 15. MEMS hybrid power generator from vibration energy. Optics and Precision Engineering, Vol. 17(6), 1262-1266, Jun. 2009. 16. Using metal-insulator-semiconductor structure to investigate dielectric charging in capacitive RF MEMS switches, Applied Physics Letter, Vol. 93 (6), pp.063506, 2008.