个人简历

教育经历\r
2011年10月-2014年9月，Tohoku University纳米机械学，工学博士；\r
2008年9月-2011年4月，西安交通大学 机械电子工程，工学硕士；\r
2009年10月-2010年9月，Tokyo Institute of Technology ，硕士联合培养；\r
2004年9月-2008年7月，武汉大学 机械设计制造及自动化，工学学士；\r
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工作经历\r
2022年1月至现在，清华大学深圳国际研究生院/清华-伯克利深圳学院，副教授，博士生导师；\r
2020年10月至2021年12月，清华大学深圳国际研究生院/清华-伯克利深圳学院，助理教授，博士生导师；\r
2019年4月至2020年9月，清华大学深圳国际研究生院，讲师；\r
2017年10月至2019年3月，清华大学深圳研究生院，讲师；\r
2016年12月-2017年9月，清华大学深圳研究生院，研究助理；\r
2014年11月-2016年11月，清华大学深圳研究生院，博士后；\r
2012年12月-2013年1月，KAIST，访问学者；\r
2011年11月-2012年1月，清华大学，访问学者；\r
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学术兼职\r
《International Journal of Precision Engineering and Manufacturing》杂志编委（韩国精密工学会KSPE主办）；\r
国际期刊《Nanomanufacturing and Metrology》青年编委；\r
日本精密工学会（The Japan Society for Precision Engineering）会员；\r
中国微米纳米技术学会高级会员；\r
国际期刊 IEEE Transactions on instrumentation measurement, Chinese Journal of Mechanical Engineering, Optics Communications，审稿人；\r
国际会议分会场主席，Session Chair, the 7th International Conference on Nanomanufacturing, Nov 17-19, 2021, Xi’an China；\r
国际会议分会场主席，Session Chair, the 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), Aug 8-10, 2018, Kunming, China；\r
国际会议分会场主席，Session Chair, the 14th International Symposium on Measurement Technology and Intelligent Instrument (ISMTII 2019), Sep 1-4, 2019, Niigata, Japan；\r
组委会成员，Organizing Committee Member of nanoMAN2022 and AETS2022, Aug 30-Sep 1, online；

研究领域

"近五年来，面向国家制造业转型升级的战略需求，围绕先进制造中精密化和智能化的重要目标，开展了精密测量技术与仪器、智能生产技术与装备两个领域的研究，搭建了纳米光栅干涉测量、先进光栅与光刻制造、微小型光谱仪与光谱共焦、高精度高动态结构光三维重建、人工智能自动缺陷检测、自主移动定位导航、超声自动化检测等八个科研方向和平台。"

近期论文

朱俊豪，汪盛通，李星辉*，面向光刻机晶圆台的超精密光栅定位技术，激光与光电子学进展，第59卷，第9期，0922019：1-17特邀综述。 Junhao Zhu, Shengtong Wang, Xinghui Li*, Ultraprecision grating positioning technology for wafer stage of lithography machine, Laser & Optoelectronics Progress, Volume 59, No.9, 0922019：1-17(Invited Review)\r
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李一鸣，杨霖，王晓浩，单硕楠，邓富元，贺志学，刘政通，李星辉*，光刻套刻误差测试技术，激光与光电子学进展，第59卷，第9期，0922023：1-12特邀综述。Yiming Li, Lin Yang, Xiaohao Wang, Shuonan Shan, Fuyuan Deng, Zhixue He, Zhengtong Liu, Xinghui Li*, Overlay metrology for lithography machine, Laser & Optoelectronics Progress, Volume 59, No.9, 0922023：1-12(Invited Review)\r
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Ruiming Chen, Yiming Li, Gaopeng Xue*, Yihao Tao, and Xinghui Li*. (2022). Laser triangulation measurement system with Scheimpflug calibration based on the Monte Carlo optimization strategy. Optics Express, 30(14), 25290-25307.\r
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Jiao Bai, Jingwen Li, Xiaohao Wang, Qian Zhou, Kai Ni and Xinghui Li*. (2022). A new method to measure spectral reflectance and film thickness using a modified chromatic confocal sensor. Optics and Lasers in Engineering, 154, 107019.\r
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Feng, F., Yuan, M., Xia, Y., Xu, H., Feng, P., andXinghui Li*. (2022). Roughness Scaling Extraction Accelerated by Dichotomy-Binary Strategy and Its Application to Milling Vibration Signal. Mathematics, 10(7), 1105.\r
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Bai, J., Wang, Y., Wang, X., Zhou, Q., Ni, K., & Xinghui Li*. (2021). Three-Probe Error Separation with Chromatic Confocal Sensors for Roundness Measurement. Nanomanufacturing and Metrology, 4(4), 247-255.\r
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Jie, W., Guangyao, H., Guochao, W., Yaning, W., Mei, H., Qixue, Xinghui Li, ... & Jun, Y. (2021). One-thousandth-level laser power stabilization based on optical feedback from a well-designed high-split-ratio and nonpolarized beam splitter. Applied Optics, 60(25), 7798-7803.\r
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Wang, G., Xue, G., Zhai, Q., Zhu, J., Yu, K., Huang, G., ... & Xinghui Li (2021). Planar diffractive grating for magneto-optical trap application: fabrication and testing. Applied Optics, 60(30), 9358-9364.\r
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Xue, G., Toda, M., Xinghui Li,, Wang, X., & Ono, T. (2021). Magnetic Resonance Force Microscopy With Vacuum-Packaged Magnetic Cantilever Towards Free Radical Detection. IEEE Sensors Journal.\r
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Yu, H., Zhou, Q., Xinghui Li, Wang, X., Wang, X., & Ni, K. (2021). Improving Resolution of Dual-Comb Gas Detection Using Periodic Spectrum Alignment Method. Sensors, 21(3), 903.\r
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Yu, H., Qian, Z., Xinghui, Li, Wang, X., & Ni, K. (2021). Phase-stable repetition rate multiplication of dual-comb spectroscopy based on a cascaded Mach–Zehnder interferometer. Optics Letters, 46(13), 3243-3246.\r
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Yu, H., Zhou, Q., Xinghui, Li, Wang, X., & Ni, K. (2021). Mode-resolved dual-comb spectroscopy using error correction based on single optical intermedium. Optics Express, 29(4), 6271-6281.\r
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Yu, K., Zhu, J., Yuan, W., Zhou, Q., Xue, G., Wu, G., ... & Xinghui Li* (2021). Two-channel six degrees of freedom grating-encoder for precision-positioning of sub-components in synthetic-aperture optics. Optics Express, 29(14), 21113-21128.\r
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Xue, G., Zhai, Q., Lu, H., Zhou, Q., Ni, K., Lin, L., ... & Xinghui Li* (2021). Polarized holographic lithography system for high-uniformity microscale patterning with periodic tunability. Microsystems & Nanoengineering, 7(1), 1-10.\r
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Jiao Bai, Xinghui Li*, Xiaohao Wang*, Jianjian Wang, Kai Ni, Qian Zhou, Self-reference dispersion correction for chromatic confocal displacement measurement, Optics and lasers in Engineering, 2021, 140, 106540:1-8 (SCI, JCR Q1, IF:4.273)\r
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Zehui Li#; Yi Yuan#; Hao Wu#; Xinghui Li; Menglei Yuan; Huaizhang Wang; Xiaoxue Wu; Shuai Liu; Xianming Zheng; Mingjun Kim; Haoyun Zheng; Sadia Rehman; Guangya Jiang*; Wangyang Fu, Investigation of MOF-derived Humidity-proof Hierarchical Porous Carbon Frameworks as Highly-selective Toluene Absorbents and Sensing Materials, Journal of Hazardous Materials, 2021, accepted for publication (2021.1.7) (SCI, JCR Q1, IF:9.038)\r
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Yuki Shimizu, Liang-Chia Chen, Dae Wook Kim, Xiuguo Chen, Xinghui Li, Hiraku Matsukuma, An insight on optical metrology in manufacturing, Measurement Science and Technology, 2020, in press. https://doi.org/10.1088/1361-6501/abc578 Accepted Manuscript online 28 October 2020 (SCI, JCR Q2, IF:1.857)\r
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王国超*，李星辉*，颜树华，谭立龙，管文良, 物理学报, 基于飞秒光梳的多路同步锁模的多波长干涉实时绝对测距及其非模糊度量程分析Real-time absolute distance measurement by multi-wavelength interferometry synchronously multi-channel phase-locked to frequency comb and analysis for the potential non-ambiguity range, 物理学报 Acta Phys Sin, 2021,70 4, 040601-1 (SCI, Q4, IF:0.732)\r
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Yaping Shi, Qian Zhou, Xinghui Li*, Kai Ni and Xiaohao Wang, Design and testing of a linear encoder capable of measuring absolute distance, Sensors and Actuators A: Physical, 111935\r
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Yaodong Han, Kai Ni, Xinghui Li*, Guanhao Wu, Kangning Yu, Qian Zhou and Xiaohao Wang, An FPGA Platform for Next-Generation Grating Encoders, Sensors 2020, 20, 2266; doi:10.3390/s20082266\r
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GaoPeng Xue, Haiou Lu, Xinghui Li*, Qian Zhou, Guanhao Wu, Xiaoha Wang and Kai Ni, Patterning nanoscale crossed grating with high uniformity by using two-axis Lloyd’s mirrors based interference lithography, Optics Express, 2020, Vol. 28(2): 2179-2191. (SCI, JCR Q1, IF:3.561)\r
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Yaping Shi, Kai Ni, Xinghui Li*, Qian Zhou and Xiaohao Wang, Highly accurate, absolute optical encoder using a hybrid-positioning method, Optics Letters, 2019, Vol. 44 (21): 5258-5231 (SCI, JCR Q1, IF:3.866)\r
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Jiao Bai, Xinghui Li*, Qian Zhou, Kai Ni, Xiaohao Wang. Improved chromatic confocal displacement sensor based on a spatial-bandpass-filter and 04an X-shaped fiber-coupler. OPTICS EXPRESS, 2019, 27(8): 10961-10973. (SCI, JCR Q1, IF:3.561)\r
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Jiao Bai, Xinghui Li*, Xiaohao Wang, Qian Zhou and Kai Ni. Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm. Sensors, (2019) 19(16), 3592. (SCI, JCR Q1, IF:3.031)\r
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Jianxiong Li, Qian Zhou, Xinghui Li*, Ruiming Chen, and Kai Ni, An Improved Low-Noise Processing Methodology Combined with PCL for Industry Inspection Based on Laser Line Scanner. Sensors, (2019)19(15), 3398. (SCI, JCR Q1, IF:3.031)\r
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Qian Zhou#, Xinghui Li #, Menglin Geng, Hiaifei Hu, Kai Ni, Lunchao Zhong, Peng Yan, and Xiaohao Wang, Economic fabrication of a novel hybrid planar Grating/Fresnel lens for miniature spectrometers, Optics Express, Vol. 26, No. 5, 2018. (SCI, JCR Q1, IF:3.561)\r
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Xinghui Li, Qian Zhou, Xiangwen Zhu, Lin Yang, Donghan Ma, JIanhui Sun, Kai NI*, Xiaohao Wang* ，Holographic fabrication of an arrayed one-axis scale grating for a two-probe optical linear encoder，Optics Express, Optics Express, 25(13), 16028-16039,(2017).\r
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Xinghui Li, Kai Ni, Qian Zhou, Peng Yan, Jinchao Pang, and Xiaohao Wang, Improved master-replica separation process for fabrication of a blazed concave grating by using a combination-type convex grating, Applied Optics. 56(2): 298 (2017). (SCI, JCR 二区，IF: 1.598)\r
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Xinghui Li, Huanhuan Wang, Kai Ni, Qian Zhou, Xinyu Mao, Lijiang Zeng, Xiaohao Wang, and Xiang Xiao, Two-probe optical encoder for absolute positioning of precision stages by using an improved scale grating, Optics Express. 24(19):21378(2016). (SCI, JCR一区，IF：3.488)\r
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Xinghui Li, Wei Gao, Yuki Shimizu, So Ito, A two-axis Lloyd’s mirror interferometer for fabrication of two dimensional diffraction gratings, CIRP Annals-Manufacturing Technology.63(1):461-464 (2014).(SCI, JCR一区，IF：2.541)\r
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Xinghui Li, Jinchao Zhang, Qian Zhou, Kai Ni, Jinchao Pang, Rui Tian, Design of a variable-line-spacing grating pattern for spectrometers based on a grating–Fresnel device, Optics Letters .41(7):1470-1473(2016). (SCI, JCR 一区，IF：3.292)\r
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Xinghui Li, Kai Ni, Qian Zhou, Xiaohao Wang, Rui Tian, Jinchao Pang, Fabrication of a concave grating with a large grid-constant via a novel dual-beam interference lithography method, Optics Express. 24(9):10759(2016). (SCI, JCR一区，IF：3.488)\r
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Xinghui Li, Tadahiko Shinshi, Wataru Hijikata, Yoshihiro Morimoto, Development of a suspension type sliding planar motion table using magnetic fluid lubrication, Review of Scientific Instruments. 87:065003 (2016). (SCI, JCR二区，IF：1.336)\r
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Xinghui Li, Yuki Shimizu, So Ito, Wei Gao, Fabrication of scale gratings for surface encoders by using laser interference lithography with 405 nm laser diodes, International Journal of Precision Engineering and Manufacturing:14(11), 1979-1988 (2013).( SCI, JCR二区，IF:1.585)\r
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Xinghui Li, Wei Gao, Hiroshi Muto, Yuki Shimizu, Ito So, Songyi Dian, A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage, Precision Engineering. 37(3):771-781 (2013). (SCI, JCR三区, IF:1.393)\r
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Xinghui Li, Yuki Shimizu, Takeshi Ito, Yindi Cai, So Ito, Wei Gao, Measurement of six-degree-of-freedom planar motions by using a multi-probe surface encoder, Optical Engineering. 53(12):094002(2014). (SCI, JCR三区，IF:0.954)\r
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Qian Zhou, Xiaorui Qiao, Kai Ni, Xinghui Li*, and Xiaohao Wang, Depth detection in interactive projection system based on one-shot black-and-white stripe pattern, Optics Express. 25(5):5341-5351 (2017). (SCI, JCR一区，IF：3.488) (通讯作者)\r
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Qian Zhou, Jinchao Pang, Xinghui Li,* Kai Ni, Rui Tian, Improving the spectral resolution of flat-field concave grating miniature spectrometers by dividing a wide spectral band into two narrow ones, Applied Optics. 54(32): 9450-9455 (2015).( SCI, JCR二区，IF：1.784，通讯作者)\r
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Qian Zhou, Jinchao Pang, Xinghui Li*, Kai Ni, Rui Tian,Concave grating miniature spectrometer with an expanded spectral band by using two entrance slits, Chines Optics Letters. 13(11):110501 (2015). (SCI, JCR二区，IF：1.851，通讯作者)\r
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Xinghui Li, Xiang Xiao, Kai Ni*, Qian Zhou, Huanhuan Wang, Xiaohao Wang, A precise reference position detection method for linear encoders by using a coherence function algorithm, Proceedings of SPIE, 10023, 100231D(2016).\r
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李星輝，清水裕樹，伊東聡，高偉: ２軸ロイドミラー干渉によるスケール格子の製作に関する研究，日本機械学会東北支部第49期総会講演会講演論文集, (2014)．【日语】