个人简历

高飞，物理学院副院长，主要从事射频等离子体的基本物理过程及与材料相互作用的研究，作为负责人承担国家重点研发计划课题、国家自然科学基金面上项目和青年基金等纵向/横向课题10余项；作为项目骨干参加ITER项目、国家重大科技专项以及国家自然科学基金重点项目等；相关研究成果发表SCI论文30多篇，获批国际/国内发明专利10余项，并获得大连理工大学“星海优青”资助。
专利
[1]一种射频放电系统及其法拉第屏蔽结构
[2]一种用于低压射频放电的石英桶密封结构
[3]一种等离子体中负离子密度测量系统和方法
[4]一种基于射频放电的正负离子源
[5]提高等离子体径向均匀性的等离子体腔室
[6]一种细长管射频感应耦合等离子体源反应器
[7]一种体产生负氢离子机制的等离子体腔室
[8]一种减少基片材料受高能离子轰击损伤的方法
[9]提高等离子体径向均匀性的等离子体腔室
[10]一种适用于低气压甚高频放电中交变磁场强度测量的探针
[11]一种细长管射频感应耦合等离子体源反应器
[12]Positive and negative ion source based on radio-frequency inductively coupled discharge
[13]一种基于射频放电的正负离子源
[14]一种适用于低气压甚高频放电中交变磁场强度测量的探针
[15]提高等离子体径向均匀性的等离子体腔室
[16]一种减少基片材料受高能离子轰击损伤的方法
[17]一种体产生负氢离子机制的等离子体腔室
[18]一种射频等离子体反应室
[19]一种产生负氢离子机制的等离子体腔室
科研项目
[1]CFETRN-NBI负离子源仿真优化设计及实验评估, 国家重点研发计划, 2017/07/01, 进行
[2]高功率微波输出窗真空及不同气压下等离子体放电模拟研究, 2015/10/30-2016/10/30, 完成
[3]面向刻蚀工艺的脉冲调制射频感应耦合等离子体源的特性研究, 国家自然科学基金, 2016/08/17, 进行
[4]宽能域离子束在等离子体中的能量沉积及其激发的自调制不稳定性和尾波场, 国家自然科学基金, 2015/09/01, 进行
[5]射频感应耦合等离子体对材料表面上原子再复合行为的影响, 国家自然科学基金, 2012/09/25, 完成
[6]高功率微波窗击穿诊断研究, 一般纵向, 2018/01/29, 进行
[7]射频容性耦合等离子体放电中电非对称效应机理的研究, 国家自然科学基金, 2014/09/25-2017/12/31, 完成
[8]弱磁场低频驱动高功率低气压感应耦合等离子体源放电机理研究, 国家自然科学基金, 2012/09/25-2016/12/31, 完成
[9]大功率低压射频感性耦合负氢离子源的物理基础研究, ITER计划, 2014/12/31, 进行
[10]微束等离子阵列反应器的初步验证, 2018/11/20-2019/11/19, 完成
[11]反应离子刻蚀大口径元件适用性研究, 2018/10/17-2018/12/31, 完成
[12]高频电极间低气压放电试验项目, 2017/01/19-2017/08/01, 完成

研究领域

研究方向
射频感性耦合等离子体物理
大功率负氢离子源物理
离子束与等离子体相互作用
高功率微波等离子体物理""

近期论文

[1] 高飞,王友年.Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O2 inductively coupled plasma[J],J. Appl. Phys.,2019,125:23303-23303
[2] 左春彦,高飞,戴忠玲,王友年.高功率微波输出窗内侧击穿动力学的PIC/MCC模拟研究[J],物理学报,2018,22:340-350
[3] Li, Jian-quan,Lu, Wen-qi,Xu, Jun,Gao, Fei,Wang, You-nian.A comparative study of emissive probe techniques for vacuum space potential measurements[J],VACUUM,2018,155:566-571
[4] Yang, Wei,Li, Hong,Gao, Fei,Wang, You-Nian.A global model study of the population dynamics of molecular hydrogen and the generation of negative hydrogen ions in low-pressure ICP discharge with an expansion region: effects of EEPF[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2018,27(7)
[5] Han, Dao-Man,Liu, Yong-Xin,Gao, Fei,Wang, Xiang-Yu,Li, Ang,Xu, Jun,Jing, Zhen-Guo,Wang, You-Nian.Observation of the standing wave effect in large-area, very-high-frequency capacitively coupled plasmas by using a fiber Bragg grating sensor[J],JOURNAL OF APPLIED PHYSICS,2018,123(22)
[6] Han, Dao-Man,Liu, Yong-Xin,Gao, Fei,Liu, Wen-Yao,Xu, Jun,Wang, You-Nian.Measurements of argon metastable density using the tunable diode laser absorption spectroscopy in Ar and Ar/O-2[J],CHINESE PHYSICS B,2018,27(6)
[7] Zhang, Yu-Ru,Hu, Yan-Ting,Gao, Fei,Song, Yuan-Hong,Wang, You-Nian.Plasma characteristics in an electrically asymmetric capacitive discharge sustained by multiple harmonics: operating in the very high frequency regime[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2018,27(5)
[8] Xue, Chan,Gao, Fei,Liu, Yong-Xin,Liu, Jia,Wang, You-Nian.Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas[J],CHINESE PHYSICS B,2018,27(4)
[9] Li, Jianquan,Lu, Wenqi,Xu, Jun,Gao, Fei,Wang, Younian.Automatic emissive probe apparatus for accurate plasma and vacuum space potential measurements[J],PLASMA SCIENCE & TECHNOLOGY,2018,20(2)
[10] 高飞,王友年.Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O2 inductively coupled plasma[J],J. Appl. Phys.,2018,125:23303-23303
[11] 左春彦,高飞,戴忠玲,王友年.高功率微波输出窗内侧击穿动力学的PIC/MCC 模拟研究[J],物理学报,2018,67(22):267-278
[12] Gao, Fei,Li, Hong,Yang, Wei,Liu, Jia,Zhang, Yu-Ru,Wang, You-Nian.Experimental and numerical investigations of electron characteristics in 2 MHz and 13.56 MHz inductively coupled hydrogen plasmas with an expansion region[J],PHYSICS OF PLASMAS,2018,25(1)
[13] Li, Jian-Quan,Lu, Wen-Qi,Xu, Jun,Gao, Fei,Wang, You-Nian.Automatic emissive probe apparatus for efficient plasma potential measurements[J],REVIEW OF SCIENTIFIC INSTRUMENTS,2017,88(11):115106
[14] 高飞,李宏,刘阳,杨唯,张钰如,王友年.大功率低气压射频感性耦合负氢离子源中电子特性的研究[A],第十八届全国等离子体科学技术会议,2017,1
[15] 左春彦,温德奇,高飞,王友年.高功率微波输出窗内等离子体产生过程PIC/MC模拟研究[A],第十八届全国等离子体科学技术会议,2017,1
[16] 薛婵,高飞,张钰如,王友年.感性耦合等离子体中射频偏压相位对离子能量分布的影响[A],第十八届全国等离子体科学技术会议,2017,1
[17] 刘刚虎,刘永新,高飞,王友年.容性耦合CF4等离子体中二次电子对电子加热模式的影响[A],第十八届全国等离子体科学技术会议,2017,1
[18] 韩道满,高飞,刘永新,徐军,王友年.甚高频大面积容性放电中电磁效应的实验研究[A],第十八届全国等离子体科学技术会议,2017,1
[19] 李宏,张钰如,高飞,王友年.射频负氢离子源放电特性的Langmuir探针诊断研究[A],第十八届全国等离子体科学技术会议,2017,1
[20] 刘永新,赵凯,温德奇,刘刚虎,李宏,高飞,张钰如,宋远红,王友年.低气压射频等离子体研究进展[A],第十八届全国等离子体科学技术会议,2017,1
[21] Gao, Fei,Zhang, Yu-Ru,Li, Hong,Liu, Yang,Wang, You-Nian.Spatial distributions of plasma parameters in inductively coupled hydrogen discharges with an expansion region[J],PHYSICS OF PLASMAS,2017,24(7)
[22] Li, Hong,Liu, Yang,Zhang, Yu-Ru,Gao, Fei,Wang, You-Nian.Nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled plasmas with argon discharges[J],JOURNAL OF APPLIED PHYSICS,2017,121(23)
[23] Xue, Chan,Wen, De-Qi,Liu, Wei,Zhang, Yu-Ru,Gao, Fei,Wang, You-Nian.Experimental and numerical investigations on time-resolved characteristics of pulsed inductively coupled O-2/Ar plasmas[J],JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2017,35(2)
[24] 张钰如,高飞,王友年.Experimental and numerical investigations on time-resolved characteristics of pulsed inductively coupled O2/Ar plasmas[J],Journal of Vacuum Science & Technology A,2017,35(2):21301-21301
[25] Yang, Wei,Li, Hong,Gao, Fei,Wang, You-Nian.Hybrid simulations of solenoidal radio-frequency inductively coupled hydrogen discharges at low pressures[J],PHYSICS OF PLASMAS,2016,23(12)
[26] Zhao, Kai,Liu, Yong-Xin,Gao, Fei,Liu, Gang-Hu,Han, Dao-Man,Wang, You-Nian.Experimental investigations of the plasma radial uniformity in single and dual frequency capacitively coupled argon discharges[J],PHYSICS OF PLASMAS,2016,23(12)
[27] Wen, De-Qi,Liu, Wei,Gao, Fei,Lieberman, M. A.,Wang, You-Nian.A hybrid model of radio frequency biased inductively coupled plasma discharges: description of model and experimental validation in argon[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2016,25(4)
[28] Han, Dao-Man,Liu, Zi-Geng,Liu, Yong-Xin,Zhang, Xin-Pu,Gao, Fei,Peng, Wei,Wang, You-Nian.Determination of neutral temperature using fiber Bragg grating sensor in capacitively coupled argon plasmas[J],JOURNAL OF APPLIED PHYSICS,2016,119(11)
[29] 刘永新,高飞,王友年.Experimental investigations of the plasma radial uniformity in single and dualfrequency capacitively coupled argon discharges[J],Phys. Plasmas,2016,23(12):123512-123512
[30] Xu Hui-Jing,Zhao Shu-Xia,Gao Fei,Zhang Yu-Ru,Li Xue-Chun,Wang You-Nian.Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model[J],CHINESE PHYSICS B,2015,24(11)
[31] Zhang, Yu-Ru,Gao, Fei,Li, Xue-Chun,Bogaerts, Annemie,Wang, You-Nian.Fluid simulation of the bias effect in inductive/capacitive discharges[J],JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2015,33(6)
[32] 温德奇,刘巍,高飞,王友年.偏压感性耦合等离子体的混合模型:模型介绍及实验验证[A],第十七届全国等离子体科学技术会议,2015,1-19
[33] 刘永新,高飞,王友年.低气压射频容性耦合等离子体中的电子加热机制[A],第十七届全国等离子体科学技术会议,2015,1-35
[34] Zhao, Shu-Xia,Gao, Fei,Wang, Ya-Ping,Wang, You-Nian,Bogaerts, Annemie.Effects of feedstock availability on the negative ion behavior in a C4F8 inductively coupled plasma[J],JOURNAL OF APPLIED PHYSICS,2015,118(3)
[35] Zhao, Shu-Xia,Zhang, Yu-Ru,Gao, Fei,Wang, You-Nian,Bogaerts, Annemie.Bulk plasma fragmentation in a C4F8 inductively coupled plasma: A hybrid modeling study[J],JOURNAL OF APPLIED PHYSICS,2015,117(24)
[36] Liu, Jia,Liu, Yong-Xin,Liu, Gang-Hu,Gao, Fei,Wang, You-Nian.Experimental investigations of driving frequency effect in low-pressure capacitively coupled oxygen discharges[J],JOURNAL OF APPLIED PHYSICS,2015,117(14)
[37] Xu, Hui-Jing,Zhao, Shu-Xia,Zhang, Yu-Ru,Gao, Fei,Li, Xue-Chun,Wang, You-Nian.Equivalent circuit effects on mode transitions in H-2 inductively coupled plasmas[J],PHYSICS OF PLASMAS,2015,22(4)
[38] Liu, Wei,Wen, De-Qi,Zhao, Shu-Xia,Gao, Fei,Wang, You-Nian.Characterization of O-2/Ar inductively coupled plasma studied by using a Langmuir probe and global model[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2015,24(2)
[39] 赵书霞,张钰如,高飞,李雪春,王友年.Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas[J],Physcis of Plasmas,2015,22(4):43508-43508
[40] 赵书霞,高飞,王友年.Characterization of O2/Ar inductively coupled plasma studied by using a Langmuir probe and global model[J],Plasma Sources Sci. Technol.,2015,24(2):25035-25035
[41] 刘永新,高飞,王友年.Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF4 and Ar/O2/CF4 discharges[J],J. Appl. Phys.,2015,117(14):143301-143301
[42] Fei, G.,Wang, Y.-N.,Yu-Ru, Z.,Shu-Xia, Z.,Xue-Chun, L.,You-Nian, W.,Gao, F.,Zhang, Y.-R.,Zhao, S.-X.,Li, X.-C..Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias[J],CHINESE PHYSICS B,2014,23(11)
[43] Gao, Fei,Zhang, Yu-Ru,Zhao, Shu-Xia,Wang, You-Nian.Experimental and numerical investigations of the phase-shift effect in capacitively coupled discharges[J],PHYSICS OF PLASMAS,2014,21(8)
[44] Liu, Yong-Xin,Gao, Fei,Liu, Jia,Wang, You-Nian.Experimental observation of standing wave effect in low-pressure very-high-frequency capacitive discharges[J],JOURNAL OF APPLIED PHYSICS,2014,116(4)
[45] Liu Y.-X.,Gao F.,Liu J.,Wang Y.-N..Experimental observation of standing wave effect in low-pressure 200 MHz capacitive discharges[A],41st IEEE International Conference on Plasma Science, ICOPS 2014 and the 20th IEEE International Conference on High-Power Particle Beams, BEAMS 2014,2014
[46] Liu, Jia,Liu, Yong-Xin,Bi, Zhen-Hua,Gao, Fei,Wang, You-Nian.Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF4 and Ar/O-2/CF4 discharges[J],JOURNAL OF APPLIED PHYSICS,2014,115(1)
[47] 高飞,张钰如,赵书霞,宋远红,王友年.Experimental and Numerical Studies of Pulse-Modulated ICP Discharges[A],2014,36-36
[48] 刘永新,高飞,王友年.Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF4 and Ar/O2/CF4 discharges[J],J. Appl. Phys.,2014,115(1):13301-13301
[49] Liu, Wei,Gao, Fei,Zhao, Shu-Xia,Li, Xue-Chun,Wang, You-Nian.Mode transition in CF4 + Ar inductively coupled plasma[J],PHYSICS OF PLASMAS,2013,20(12)
[50] Gao Fei,Liu Wei,Zhao Shu-Xia,Zhang Yu-Ru,Sun Chang-Sen,Wang You-Nian.Changes of the electron dynamics in hydrogen inductively coupled plasma[J],CHINESE PHYSICS B,2013,22(11)
[51] Liu, Jia,Wen, De-Qi,Liu, Yong-Xin,Gao, Fei,Lu, Wen-Qi,Wang, You-Nian.Experimental and numerical investigations of electron density in low-pressure dual-frequency capacitively coupled oxygen discharges[J],JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2013,31(6)
[52] 杜永权,刘文耀,朱爱民,李小松,赵天亮,刘永新,高飞,徐勇,王友年.双频容性耦合等离子体相分辨发射光谱诊断[J],物理学报,2013,62(20):1-7
[53] 刘巍,高飞,赵书霞,王友年.射频感应耦合CF_4/Ar等离子体中模式转换的实验研究[A],第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会,2013,1
[54] 刘巍,高飞,赵书霞,王友年.射频感应耦合CF4/Ar等离子体中模式转换的实验研究[A],第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会论文集中国力学学会;中国物理学会;中国核学会,2013,286-286
[55] 高飞,刘巍,张钰如,赵书霞,李雪春,王友年.射频感应耦合等离子体的模式跳变及偏压效应的实验研究[A],第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会论文集中国力学学会;中国物理学会;中国核学会,2013,290-290
[56] 刘佳,张权治,刘永新,高飞,王友年.低气压双频容性耦合氩氧混合放电离子能量分布[A],第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会,2013,285-285
[57] Liu, Jia,Zhang, Quan-Zhi,Liu, Yong-Xin,Gao, Fei,Wang, You-Nian.Measurements of ion energy distributions in a dual-frequency capacitively coupled plasma for Ar/O-2 discharges[J],JOURNAL OF PHYSICS D-APPLIED PHYSICS,2013,46(23)
[58] Zhao, Shu-Xia,Gao, Fei,Wang, You-Nian,Bogaerts, Annemie.Gas ratio effects on the Si etch rate and profile uniformity in an inductively coupled Ar/CF4 plasma[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2013,22(1)
[59] 刘永新,高飞,陆文琪,王友年.Experimental and numerical investigations of electron density[J],J. Vac. Sci. Technol. A,2013,31(6):61308-61308
[60] 高飞,赵书霞,李雪春,王友年.Mode transition in CF41 Ar inductively coupled plasma[J],PHYSICS OF PLASMAS,2013,20(12):123513-123513